Concepedia

Marco Meinig

MM

Statistics

Publications

7

Citations

126

H-Index

7

Active since

2010

Affiliations

Fraunhofer Institute for Electronic Nano Systems(Current)

Chemnitz University of Technology

InfraTec (Germany)

Jenoptik (Germany)

Marco Meinig is an author at Fraunhofer Institute for Electronic Nano Systems specializing in optical properties, engineering, and instrumentation.

Top concepts

EngineeringOptical PropertiesPhotonicsApplied PhysicsInstrumentationOptical SensorsMicrofabricationSensor TechnologyEducationMeasurement

Publications per year

2010–2018

7

Publications

7

Determination of Parameters With Uncertainties for Quality Control in MEMS Fabrication

Marc Gennat, Marco Meinig, Alexey Shaporin et al. · Journal of Microelectromechanical Systems · 2013 · 27 citations

Engineering, Measurement, Mechanical Engineering +18

Widely tunable Fabry-Perot filter based MWIR and LWIR microspectrometers

Martin Ebermann, Norbert Neumann, Karla Hiller et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 25 citations

Recent advances in expanding the spectral range of MEMS Fabry-Perot filters

Martin Ebermann, Norbert Neumann, Karla Hiller et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 21 citations

Dual-band MEMS Fabry-Pérot filter with two movable reflectors for mid- and long-wave infrared microspectrometers

Marco Meinig, Martin Ebermann, Norbert Neumann et al. · 2011 · 19 citations

Photonics, Sensor Technology, Fast Microspectrometer Module +14

Uncooled IR sensors with tunable MEMS Fabry-Pérot filters for the long-wave infrared range

Norbert Neumann, Martin Ebermann, Elvira Gittler et al. · 2010 · 14 citations

Short Wavelength Optic, Optical Materials, Engineering +17

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