Marco Meinig

Statistics

Publications

Citations

128

H-Index

Active since

2010

Affiliations

Fraunhofer Institute for Electronic Nano Systems(Current)

Chemnitz University of Technology

InfraTec (Germany)

Jenoptik (Germany)

Marco Meinig is an author at Fraunhofer Institute for Electronic Nano Systems specializing in microelectromechanical systems, materials science, and mems filters.

Publications per year

2010–2018

Publications

Determination of Parameters With Uncertainties for Quality Control in MEMS Fabrication

Marc Gennat, Marco Meinig, Alexey Shaporin et al. · Journal of Microelectromechanical Systems · 2013 · 28 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Widely tunable Fabry-Perot filter based MWIR and LWIR microspectrometers

Martin Ebermann, Norbert Neumann, Karla Hiller et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 25 citations

Engineering, Materials Engineering, Materials Science +17

Recent advances in expanding the spectral range of MEMS Fabry-Perot filters

Martin Ebermann, Norbert Neumann, Karla Hiller et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 22 citations

Engineering, Electrical Engineering, Materials Science +17

Dual-band MEMS Fabry-Pérot filter with two movable reflectors for mid- and long-wave infrared microspectrometers

Marco Meinig, Martin Ebermann, Norbert Neumann et al. · 2011 · 19 citations

Engineering, Materials Science, Mechanical Engineering +17

Uncooled IR sensors with tunable MEMS Fabry-Pérot filters for the long-wave infrared range

Norbert Neumann, Martin Ebermann, Elvira Gittler et al. · 2010 · 14 citations

Natural Sciences, Electrical Engineering, Materials Science +17

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