Concepedia

Publication | Closed Access

Numerical characterization and experimental verification of an in-plane MEMS-actuator with thin-film aluminum heater

DOI

14

Citations

15

References

2014

Year

Peter Meszmer, Karla Hiller, Steffen Hartmann, Alexey Shaporin, Daniel May, Raúl D. Rodriguez, J. Arnold, Gianina Schondelmaier, Jan Mehner, Dietrich R. T. Zahn,
Microsystem Technologies

References

YearCitations

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