Microsystem Technologies · 2014 · 14 citations · 15 references
EngineeringMaterials ScienceMechanical EngineeringHeat TransferMicroelectromechanical SystemsThin FilmsActuator MaterialsMems ActuatorsMems CharacterizationMems ModelingThermal ActuationThermal ActuatorsActuator Performance MeasurementElectrothermal ActuationIn-plane ActuatorsMems Actuator TestingMems Thermal ActuatorsNumerical ModellingThermal Modeling Of MicroactuatorsThin-film Actuator Materials
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