Numerical characterization and experimental verification of an in-plane MEMS-actuator with thin-film aluminum heater

Peter Meszmer, Karla Hiller, Steffen Hartmann, Alexey Shaporin, Daniel May, Raúl D. Rodriguez, J. Arnold, Gianina Schondelmaier, Jan Mehner, Dietrich R. T. Zahn,

Microsystem Technologies · 2014 · 14 citations · 15 references

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