Concepedia

In-plane Actuators

In-Plane Actuators is an electrostatic actuator configuration in which the generated motion is parallel to the plane of the substrate, distinguishing it from out-of-plane designs by leveraging lateral electrostatic forces between interdigitated or parallel electrodes fabricated on the same surface layer.

23

Publications

593

Citations

82

Authors

27

Institutions

Publications per year

2017–2026

5

Parents

Publications

23

Large Stroke Electrostatic Comb-Drive Actuators Enabled by a Novel Flexure Mechanism

Mohammad Olfatnia, Jason J. Gorman, Shorya Awtar · Journal of Microelectromechanical Systems · 2012 · 56 citations

, , +15

Optimized electrostatic inchworm motors using a flexible driving arm

Ivan Penskiy, Sarah Bergbreiter · Journal of Micromechanics and Microengineering · 2012 · 51 citations

, , +17

Bi-directional electrothermal electromagnetic actuators

Andrew Cao, Jongbaeg Kim, Liwei Lin · Journal of Micromechanics and Microengineering · 2007 · 42 citations

, , +16

Analysis of lateral instability of in-plane comb drive MEMS actuators based on a two-dimensional model

Wei Huang, Ganyu Lu · Sensors and Actuators A Physical · 2004 · 41 citations

, , +12

COMPACT, SCALABLE, HIGH-RESOLUTION, MEMS-ENABLED TACTILE DISPLAYS

X. Sunney Xie, Yuri Zaitsev, Luis Fernando Velásquez–García et al. · 2014 Solid-State, Actuators, and Microsystems Workshop Technical Digest · 2014 · 40 citations · Full text

, , +16

1–5 of 23

Authors

82

  1. YL
    Yifan Lu

    Harbin Institute of Technology, China

    2 publications · 49 citations

    2

    h-index

  2. HY
    Honghao Yue

    Harbin Institute of Technology, China

    2 publications · 49 citations

    2

    h-index

  3. JK
    Jongbaeg Kim

    Yonsei University, South Korea

    2 publications · 52 citations

    2

    h-index

  4. YT
    Yukinori Tsurumi

    The University of Tokyo, Japan

    1 publications · 19 citations

    1

    h-index

  5. DL
    Damien Loterie

    École Polytechnique Fédérale de Lausanne, Switzerland

    1 publications · 36 citations

    1

    h-index

1–5 of 82

Institutions

27

  1. University of California, Berkeley

    Berkeley, United States

    3 h-index

    6 publications

    179 citations

  2. Yonsei University

    Seoul, South Korea

    2 h-index

    2 publications

    52 citations

  3. Harbin Institute of Technology

    Harbin, China

    2 h-index

    7 publications

    182 citations

  4. Hanyang University

    Seoul, South Korea

    1 h-index

    1 publications

    31 citations

  5. Cory Laboratories

    Alsip, United States

    1 h-index

    1 publications

    38 citations

  6. McGill University

    Montreal, Canada

    1 h-index

    1 publications

    35 citations

  7. Robotics Research (United States)

    Cincinnati, United States

    1 h-index

    3 publications

    66 citations

  8. University of Maryland, College Park

    College Park, United States

    1 h-index

    2 publications

    102 citations

1–8 of 27

Venues

  1. Journal of Micromechanics and Microengineering

    JMM · 3 publications · 103 citations

    3

    h-index

  2. Sensors and Actuators A Physical

    3 publications · 91 citations

    3

    h-index

  3. Journal of Microelectromechanical Systems

    1 publications · 24 citations

    2

    h-index

  4. 1

    h-index

  5. Mechatronics

    1 publications · 13 citations

    1

    h-index

1–5