2014 Solid-State, Actuators, and Microsystems Workshop Technical Digest

COMPACT, SCALABLE, HIGH-RESOLUTION, MEMS-ENABLED TACTILE DISPLAYS

X. Sunney Xie, Yuri Zaitsev, Luis Fernando Velásquez–García et al. · 2014 · 40 citations · Full text

Engineering, Mechatronics Engineering, Actuators +16

FUSED SILICA MICRO BIRDBATH SHELL RESONATORS WITH 1.2 MILLION Q AND 43 SECOND DECAY TIME CONSTANT

J. Cho, Tal Nagourney, Ali Darvishian et al. · 2014 · 33 citations · Full text

Engineering, Materials Science, Physics +17

1 MILLION Q-FACTOR DEMONSTRATED ON MICRO-GLASSBLOWN FUSED SILICA WINEGLASS RESONATORS WITH OUT-OF-PLANE ELECTROSTATIC TRANSDUCTION

Doruk Senkal, Mohammed Jalal Ahamed, Sina Askari et al. · 2014 · 29 citations · Full text

Engineering, Materials Engineering, Materials Science +16

LAMB WAVE MICROMECHANICAL RESONATORS FORMED IN THIN PLATES OF LITHIUM NIOBATE

Roy H. Olsson, Khalid Hattar, Michael S. Baker et al. · 2014 · 27 citations · Full text

Natural Sciences, Materials Science, Physics +14

AN ETCH HOLE-FREE PROCESS FOR TEMPERATURE-COMPENSATED, HIGH Q, ENCAPSULATED RESONATORS

Eldwin J. Ng, Yushi Yang, Y. Chen et al. · 2014 · 25 citations · Full text

Engineering, Electrical Engineering, Materials Science +17