Michael S. Baker

A high electromechanical coupling coefficient SH0 Lamb wave lithium niobate micromechanical resonator and a method for fabrication

Roy H. Olsson, Khalid Hattar, Sara Jensen Homeijer et al. · Sensors and Actuators A Physical · 2014 · 108 citations

Materials Science, Electrical Engineering, Engineering +7

Post-CMOS-Compatible Aluminum Nitride Resonant MEMS Accelerometers

Roy H. Olsson, Kenneth E. Wojciechowski, Michael S. Baker et al. · Journal of Microelectromechanical Systems · 2009 · 96 citations

Electrical Engineering, Aluminum Nitride, Vibrations +12

A nanomechanical switch for integration with CMOS logic

David A. Czaplewski, Gary A. Patrizi, Garth M. Kraus et al. · Journal of Micromechanics and Microengineering · 2009 · 81 citations

Engineering, Device Integration, Microelectromechanical Systems +16

Design Optimization of a Fully-Compliant Bistable Micro-Mechanism

Brian D. Jensen, Matthew B. Parkinson, Katsuo Kurabayashi et al. · Micro-Electro-Mechanical Systems (MEMS) · 2001 · 76 citations

Engineering, Soft Robotics, Flexible Electronics +15

Post-CMOS Compatible Aluminum Nitride MEMS Filters and Resonant Sensors

Roy H. Olsson, James G. Fleming, Kenneth E. Wojciechowski et al. · Proceedings of the IEEE International Frequency Control Symposium · 2007 · 62 citations

Resonant Sensors, Electrical Engineering, Engineering +11