Concepedia

A high electromechanical coupling coefficient SH0 Lamb wave lithium niobate micromechanical resonator and a method for fabrication

Roy H. Olsson, Khalid Hattar, Sara Jensen Homeijer, Michael Wiwi, Matt Eichenfield, Darren W. Branch, Michael S. Baker, Janet Nguyen, Blythe Clark, Todd Bauer,

Sensors and Actuators A Physical · 2014 · 108 citations · 19 references

DOI

Concepts

References

19

Design and Analysis of Lithium–Niobate-Based High Electromechanical Coupling RF-MEMS Resonators for Wideband Filtering

Songbin Gong, Gianluca Piazza · IEEE Transactions on Microwave Theory and Techniques · 2012 · 313 citations

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Piezoelectric aluminum nitride thin films for microelectromechanical systems

Gianluca Piazza, Valeriy Felmetsger, Paul Muralt et al. · MRS Bulletin · 2012 · 237 citations · Full text

, , +16

Single-Chip Multiple-Frequency ALN MEMS Filters Based on Contour-Mode Piezoelectric Resonators

Gianluca Piazza, Philip J. Stephanou, Albert P. Pisano · Journal of Microelectromechanical Systems · 2007 · 222 citations · Full text

, , +17

Thin-film piezoelectric-on-silicon resonators for high-frequency reference oscillator applications

Reza Abdolvand, Hossein Miri Lavasani, G.K. Ho et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2008 · 221 citations

, , +13

PCS 1900 MHz duplexer using thin film bulk acousticresonators (FBARs)

R. Ruby, P. Bradley, John D. Larson et al. · Electronics Letters · 1999 · 196 citations

, , +16