Publication | Closed Access
A high electromechanical coupling coefficient SH0 Lamb wave lithium niobate micromechanical resonator and a method for fabrication
108
Citations
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References
2014
Year
Materials ScienceElectrical EngineeringEngineeringMicrofabricationMechanical EngineeringNano Electro Mechanical SystemCoefficient Sh0 LambPiezoelectricityMicro-electromechanical SystemMicromachined Ultrasonic Transducer
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