Micro-Electro-Mechanical Systems (MEMS)

Design Optimization of a Fully-Compliant Bistable Micro-Mechanism

Brian D. Jensen, Matthew B. Parkinson, Katsuo Kurabayashi et al. · 2001 · 76 citations

Engineering, Mechanical Engineering, Actuators +16

Monatomic and Polyatomic Gas Flow Through Uniform Microchannels

Jack C. Shih, Chih‐Ming Ho, Jianqiang Liu et al. · 1996 · 59 citations

Engineering, Chemical Engineering, Mechanical Engineering +17

Designing High-Performance Micro-Pumps Based on No-Moving-Parts Valves

Ron L. Bardell, Nigel R. Sharma, Fred K. Forster et al. · 1997 · 54 citations

Engineering, Chemical Engineering, Hydraulics +12

An Approach to Macromodeling of MEMS for Nonlinear Dynamic Simulation

G. K. Ananthasuresh, Raj Kumar Gupta, S.D. Senturia · 1996 · 52 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Convection-Based Accelerometer and Tilt Sensor Implemented in Standard CMOS

V. Milanović, E.D. Bowen, N. H. Tea et al. · 1998 · 50 citations

Engineering, Mechanical Engineering, Heat Transfer +16