Y. Chen

On-chip ovenization of encapsulated Disk Resonator Gyroscope (drg)

Chang-Nam Ahn, Vu A. Hong, Woo‐Tae Park et al. · 2015 · 31 citations

Engineering, Electrical Engineering, Mechanical Engineering +16

AN ETCH HOLE-FREE PROCESS FOR TEMPERATURE-COMPENSATED, HIGH Q, ENCAPSULATED RESONATORS

Eldwin J. Ng, Yushi Yang, Y. Chen et al. · 2014 Solid-State, Actuators, and Microsystems Workshop Technical Digest · 2014 · 25 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

A high-frequency epitaxially encapsulated single-drive quad-mass tri-axial resonant tuning fork gyroscope

S. Wisher, Arashk Norouzpour-Shirazi, Yushi Yang et al. · 2016 · 12 citations

Engineering, Electrical Engineering, Mechanical Engineering +15

Wide-range temperature dependence studies for devices limited by thermoelastic dissipation and anchor damping

Janna Rodriguez, Dustin D. Gerrard, Saurabh A. Chandorkar et al. · 2017 · 11 citations

Engineering, Materials Science, Mechanical Engineering +15