Concepedia
Materials Chemistry and Physics · 1998 · 10 citations · 4 references
EngineeringChemical EngineeringSurface EngineeringWater TreatmentChemical CleaningCleaning OperationsCleanroom ProcessingChemical Cleaning AgentsChemical Cleaning ProtocolsCleaning ProcessesPost-contamination CleaningSpray Finishing
4
The Evolution of Silicon Wafer Cleaning Technology
Werner Kern · Journal of The Electrochemical Society · 1990 · 1.7K citations
Engineering, Electrical Engineering, Materials Science +17
Chemical‐Mechanical Polishing for Fabricating Patterned W Metal Features as Chip Interconnects
F. B. Kaufman, Daniel B. Thompson, R. E. Broadie et al. · Journal of The Electrochemical Society · 1991 · 511 citations
Engineering, Materials Engineering, Materials Science +17
Integration of chemical-mechanical polishing into CMOS integrated circuit manufacturing
Howard Landis, Peter J. Burke, W. Cote et al. · Thin Solid Films · 1992 · 104 citations
Engineering, Manufacturing Engineering, Materials Science +12
A four-level VLSI bipolar metallization design with chemical-mechanical planarization
W. L. Guthrie, W. Patrick, E. Levine et al. · IBM Journal of Research and Development · 1992 · 29 citations
Engineering, Electrical Engineering, Materials Engineering +17