Concepedia

Publication | Closed Access

Integration of chemical-mechanical polishing into CMOS integrated circuit manufacturing

DOI

104

Citations

5

References

1992

Year

Howard Landis, Peter J. Burke, W. Cote, William R. Hill, Cheryl Hoffman, Carter Kaanta, Charles W. Koburger, Walter Lange, Micheal Leach, S.L. Luce
Thin Solid Films

References

YearCitations

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