Concepedia

S.L. Luce

SL

2

Publications

146

Citations

2

H-Index

1992

Active since

Affiliations

IBM (United States)(Current)

S.L. Luce is an author at IBM (United States) specializing in microfabrication, microelectronics, and materials science.

Top concepts

EngineeringMaterial ScienceMicroelectronicsMicrofabricationMicrostructureApplied PhysicsIntegrated CircuitsElectronic PackagingMaterials EngineeringElectrical Engineering

Publications per year

1992–2002

2

Publications

2

Integration of chemical-mechanical polishing into CMOS integrated circuit manufacturing

Howard Landis, Peter J. Burke, W. Cote et al. · Thin Solid Films · 1992 · 104 citations

Materials Science, Wafer Scale Processing, Engineering +7

Sub-0.25-micron interconnection scaling: damascene copper versus subtractive aluminum

A. K. Stamper, T.L. McDevitt, S.L. Luce · 2002 · 42 citations

Aluminium Nitride, Engineering, Interconnect (Integrated Circuits) +16

Rows per page

1–2 of 2