S.L. Luce - Concepedia

Author

S.L. Luce

Also Known As

S.L. Luce, Stephen Luce

Publications

151

Citations

H-Index

Concepts

All Affiliations

S.L. Luce is an author at IBM (United States) specializing in microfabrication, microelectronics, and materials science.

#	Concept	H-Index	Publications	Citations
1	Engineering	2	2	146
2	Materials Science	2	2	146
3	Applied Physics	1	1	42
4	Electrical Engineering	1	1	42
5	Materials Engineering	1	1	42

S.L. Luce

Publications

146

Citations

H-Index

Page 1

	Year	Citations
Integration of chemical-mechanical polishing into CMOS integrated circuit manufacturing Howard Landis, Peter J. Burke, W. Cote, Thin Solid Films Materials ScienceWafer Scale ProcessingEngineeringMicrofabricationCircuit Manufacturing	1992	104
Sub-0.25-micron interconnection scaling: damascene copper versus subtractive aluminum A. K. Stamper, T.L. McDevitt, S.L. Luce Aluminium NitrideEngineeringInterconnect (Integrated Circuits)High DensityWafer Scale Processing	2002	42

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