Carter Kaanta - Concepedia

Author

Carter Kaanta

Also Known As

C. Kaanta, C.W. Kaanta, Carter Kaanta

Publications

271

Citations

H-Index

Concepts

All Affiliations

Carter Kaanta is an author at IBM (United States) specializing in engineering, microelectronics, and electrical engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	5	5	271
2	Electrical Engineering	4	4	167
3	Applied Physics	3	3	76
4	Computer Engineering	3	3	135
5	Materials Engineering	1	1	32

Carter Kaanta

Publications

271

Citations

H-Index

Page 1

	Year	Citations
Integration of chemical-mechanical polishing into CMOS integrated circuit manufacturing Howard Landis, Peter J. Burke, W. Cote, Thin Solid Films Materials ScienceWafer Scale ProcessingEngineeringMicrofabricationCircuit Manufacturing	1992	104
Dual Damascene: a ULSI wiring technology Carter Kaanta, S.G. Bombardier, W. Cote, Insulator MatrixEngineeringDevice IntegrationElectronic DesignComputer Architecture	2002	91
Chemical Vapor Deposition of Tungsten (CVD W) as Submicron Interconnection and Via Stud Pei‐Ing Lee, John P. Cronin, Carter Kaanta Journal of The Electrochemical Society Materials EngineeringMaterials ScienceElectrical EngineeringEngineeringAdvanced Packaging (Semiconductors)	1989	32
Submicron wiring technology with tungsten and planarization Carter Kaanta, W. Cote, John Cronin, Electrical EngineeringComplementary InsulatorEngineeringAdvanced Packaging (Semiconductors)Nanoelectronics	1987	28
Submicron wiring technology with tungsten and planarization Carter Kaanta, W. Cote, John Cronin, Non-volatile MemoryEngineeringEmerging Memory TechnologyComputer ArchitectureIntegrated Circuits	2003	16

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