Carter Kaanta

Integration of chemical-mechanical polishing into CMOS integrated circuit manufacturing

Howard Landis, Peter J. Burke, W. Cote et al. · Thin Solid Films · 1992 · 104 citations

Materials Science, Wafer Scale Processing, Engineering +7

Dual Damascene: a ULSI wiring technology

Carter Kaanta, S.G. Bombardier, W. Cote et al. · 2002 · 91 citations

Insulator Matrix, Engineering, Device Integration +19

Chemical Vapor Deposition of Tungsten (CVD W) as Submicron Interconnection and Via Stud

Pei‐Ing Lee, John P. Cronin, Carter Kaanta · Journal of The Electrochemical Society · 1989 · 32 citations

Materials Engineering, Materials Science, Electrical Engineering +14

Submicron wiring technology with tungsten and planarization

Carter Kaanta, W. Cote, John Cronin et al. · 1987 · 28 citations

Electrical Engineering, Complementary Insulator, Engineering +13

Submicron wiring technology with tungsten and planarization

Carter Kaanta, W. Cote, John Cronin et al. · 2003 · 16 citations

Non-volatile Memory, Engineering, Emerging Memory Technology +19