Conformity and structure of titanium oxide films grown by atomic layer deposition on silicon substrates - Concepedia

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Conformity and structure of titanium oxide films grown by atomic layer deposition on silicon substrates

55

Citations

43

References

2007

Year

Indrek Jõgi, Martti Pärs, Jaan Aarik, Aleks Aidla, M. Laan, Jonas Sundqvist, L. Oberbeck, Johannes Heitmann, Kaupo Kukli

Thin Solid Films

Materials ScienceMaterials EngineeringEngineeringNanotechnologyOxide ElectronicsSurface ScienceApplied PhysicsSilicon SubstratesThin FilmsChemical DepositionChemical Vapor DepositionAtomic Layer DepositionThin Film Processing

References

	Year	Citations

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