The influence of addition elements on the early resistance changes observed during electromigration testing of Al metal lines

W.A De Ceuninck, V. D’Haeger, J. Van Olmen, Ann Witvrouw, Karen Maex, L. De Schepper, Peter De Pauw, A Pergoot

Microelectronics Reliability · 1998 · 10 citations · 11 references

Concepts

References

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