Silicon layer transfer using wafer bonding and debonding - Concepedia

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Silicon layer transfer using wafer bonding and debonding

10

Citations

5

References

2001

Year

Cynthia A. Colinge, B. Roberds, B.S. Doyle

Journal of Electronic Materials

Electrical EngineeringWafer Scale ProcessingEngineeringMicrofabricationSilicon Layer TransferApplied PhysicsSemiconductor Device FabricationElectronic PackagingSilicon On InsulatorMicroelectronics

References

	Year	Citations

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