Preparation and rapid thermal annealing of AlN thin films grown by molecular beam epitaxy - Concepedia

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Preparation and rapid thermal annealing of AlN thin films grown by molecular beam epitaxy

51

Citations

20

References

2009

Year

B. Liu, Jianhong Gao, K. M. Wu, C. Liu

Solid State Communications

Materials EngineeringMaterials ScienceAluminium NitrideEngineeringApplied PhysicsRapid Thermal AnnealingThin FilmsMolecular Beam EpitaxyEpitaxial GrowthAln Thin FilmsThin Film Processing

References

	Year	Citations

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