Publication | Closed Access
High aspect ratio nano mold fabrication by advanced edge lithography without CVD
12
Citations
17
References
2011
Year
Materials ScienceWafer Scale ProcessingEngineeringBeam LithographyNanomaterialsNanotechnologyMicrofabricationNanomanufacturingMechanical EngineeringAdvanced Edge LithographyFabrication TechniqueNanolithographyNanofabricationNanolithography MethodMolding (Process)
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