High aspect ratio nano mold fabrication by advanced edge lithography without CVD

Imprint of sub-25 nm vias and trenches in polymers

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Applied Physics Letters · 1995 · 2.7K citations

Engineering, Manufacturing Engineering, Materials Science +15

Sub-10 nm imprint lithography and applications

Stephen Y. Chou, Peter R. Krauss, Wei Zhang et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 1.1K citations

Engineering, Electrical Engineering, Materials Science +14

A spacer patterning technology for nanoscale CMOS

Yang‐Kyu Choi, Tsu-Jae King, Chenming Hu · IEEE Transactions on Electron Devices · 2002 · 207 citations

Engineering, Electrical Engineering, Materials Science +17

Fabrication of Sub-10-nm Silicon Nanowire Arrays by Size Reduction Lithography

Yang‐Kyu Choi, Ji Zhu, Jeff Grunes et al. · The Journal of Physical Chemistry B · 2003 · 173 citations

Engineering, Materials Engineering, Materials Science +17

Sublithographic nanofabrication technology for nanocatalysts and DNA chips

Yang‐Kyu Choi, Joon Sung Lee, Ji Zhu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 68 citations

Engineering, Materials Engineering, Materials Science +17