A novel flexure-based microgripper with double amplification mechanisms for micro/nano manipulation

Abstract

This paper describes the design, modeling, and testing of a novel flexure-based microgripper for a large jaw displacement with high resolution. Such a microgripper is indispensable in micro∕nano manipulation. In achieving a large jaw displacement, double amplification mechanisms, namely, Scott-Russell mechanism and leverage mechanism arranged in series, are utilized to overcome the limited output of microgrippers driven by piezoelectric actuators. The mechanical performance of the microgripper is analyzed using the pseudo rigid body model approach. Finite element analysis is conducted to evaluate the performance and validate the established models for further optimum design of the microgripper. The prototype of the developed microgripper is fabricated, with which experimental tests are carried out. The experimental results show that the developed microgripper is capable of handling various sized micro-objects with a maximum jaw displacement of 134 μm and a high amplification ratio of 15.5.