A microgripper using piezoelectric actuation for micro-object manipulation

Silicon-processed overhanging microgripper

Chang‐Jin Kim, Albert P. Pisano, R.S. Muller · Journal of Microelectromechanical Systems · 1992 · 218 citations

Engineering, Materials Science, Mechanical Engineering +17

Micro-systems in biomedical applications

Paolo Dario, Maria Chiara Carrozza, Antonella Benvenuto et al. · Journal of Micromechanics and Microengineering · 2000 · 191 citations

Engineering, Bioengineering, Biomedical Engineering +13

An electro-thermally and laterally driven polysilicon microactuator

Chi Shiang Pan, Wensyang Hsu · Journal of Micromechanics and Microengineering · 1997 · 152 citations

Engineering, Mechanical Engineering, Robotics Engineering +17

SMA microgripper with integrated antagonism

Manfred Kohl, E. Just, Wilhelm Pfleging et al. · Sensors and Actuators A Physical · 2000 · 140 citations

Engineering, Electrical Engineering, Mechanical Engineering +8

Analysis of closed-loop control of parallel-plate electrostatic microgrippers

Patrick Chu, S.J. Pister · 2002 · 137 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17