Generation of cavities in silicon wafers by laser ablation using silicon nitride as sacrificial layer

Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers

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Bulk micromachining of silicon

G.T.A. Kovacs, N.I. Maluf, K. Petersen · Proceedings of the IEEE · 1998 · 721 citations

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Laser fabrication and machining of materials

Choice Reviews Online · 2008 · 398 citations

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Fabrication of novel three-dimensional microstructures by the anisotropic etching of

E. Bassous · IEEE Transactions on Electron Devices · 1978 · 311 citations

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The effect of isopropyl alcohol on etching rate and roughness of (1 0 0) Si surface etched in KOH and TMAH solutions

Irena Zubel, M. Kramkowska · Sensors and Actuators A Physical · 2001 · 215 citations

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