Concepedia

Publication | Closed Access

Surface micromachined tuneable interferometer array

DOI

50

Citations

4

References

1994

Year

Katsuhisa Aratani, P.J. French, P.M. Sarro, Daniel Puiu Poenar, R.F. Wolffenbuttel, S. Middelhoek
Sensors and Actuators A Physical

References

YearCitations

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