P.J. French

Surface micromachined tuneable interferometer array

Katsuhisa Aratani, P.J. French, P.M. Sarro et al. · Sensors and Actuators A Physical · 1994 · 51 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +11

Formation of porous silicon using an ammonium fluoride based electrolyte for application as a sacrificial layer

Michael Kuhl, G.M. O’Halloran, P.T.J. Gennissen et al. · Journal of Micromechanics and Microengineering · 1998 · 17 citations

Engineering, Materials Engineering, Materials Science +17

PSG layers for surface micromachining

Daniel Puiu Poenar, P.J. French, Rainer Mallée et al. · Sensors and Actuators A Physical · 1994 · 17 citations

Engineering, Materials Engineering, Materials Science +10

Frequency output piezoresistive pressure sensor

P.J. French, A.P. Dorey · Sensors and Actuators · 1983 · 15 citations

Engineering, Electrical Engineering, Mechanical Engineering +12

Process and design considerations for surface micromachined beams for a tuneable interferometer array in silicon

Katsuhisa Aratani, P.J. French, P.M. Sarro et al. · 2002 · 12 citations

Engineering, Electrical Engineering, Materials Engineering +17