Concepedia
Sensors and Actuators A Physical · 1994 · 17 citations · 8 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationSurface ScienceThin FilmsCoatingsMicrofabrication ProcessesMicromachiningSurface MicromachiningSurface ModificationSurface PreparationMicro-patterned Surfaces
8
Comparison of techniques for measuring both compressive and tensile stress in thin films
B.P. van Drieënhuizen, J.F.L. Goosen, P.J. French et al. · Sensors and Actuators A Physical · 1993 · 149 citations
Natural Sciences, Materials Engineering, Materials Science +14
Structure analysis of silicon dioxide films formed by oxidation of silane
Naoyuki Nagasima · Journal of Applied Physics · 1972 · 45 citations
Natural Sciences, Chemistry, Materials Science +15
Comparison of Phosphosilicate Glass Films Deposited by Three Different Chemical Vapor Deposition Methods
Yoshimi Shioya, Mamoru Maeda · Journal of The Electrochemical Society · 1986 · 30 citations
Natural Sciences, Materials Engineering, Materials Science +16
Water Absorption and Densification of Phosphosilicate Glass Films
Richard Levin · Journal of The Electrochemical Society · 1982 · 26 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +13
CVD glass films for passivation of silicon devices - Preparation, composition, and stress properties
Werner Kern, G.L. Schnable, Andreas Fisher · 1976 · 18 citations
Engineering, Materials Engineering, Materials Science +16