Proposal of human eye's crystalline lens-like variable focusing lens

Mechanical property measurements of thin films using load-deflection of composite rectangular membranes

Osamu Tabata, Ken Kawahata, Susumu Sugiyama et al. · Sensors and Actuators · 1989 · 400 citations

Natural Sciences, Materials Engineering, Materials Science +16

Microfabricated structures for the <i>i</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> measurement of residual stress, Young’s modulus, and ultimate strain of thin films

Mark G. Allen, Mehran Mehregany, Roger T. Howe et al. · Applied Physics Letters · 1987 · 253 citations

Natural Sciences, Materials Engineering, Materials Science +17

A new analytical solution for the load-deflection of square membranes

D Maier-Schneider, Julia Maibach · Journal of Microelectromechanical Systems · 1995 · 208 citations

Natural Sciences, Materials Engineering, Materials Science +17

Technology and applications of micromachined silicon adaptive mirrors

Gleb Vdovin · Optical Engineering · 1997 · 95 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +15

Measurements of the mechanical behaviour of micromachined silicon and silicon-nitride membranes for microphones, pressure sensors and gas flow meters

R. Schellin, G. Hess, Wolfgang Kühnel et al. · Sensors and Actuators A Physical · 1994 · 45 citations

Engineering, Materials Science, Mechanical Engineering +17