Concepedia

D Maier-Schneider

DM

4

Publications

450

Citations

4

H-Index

1992

Active since

Affiliations

Technische Universität Berlin(Current)

D Maier-Schneider is an author at Technische Universität Berlin specializing in applied physics, engineering, and thin films.

Top concepts

Thin FilmsEngineeringApplied PhysicsMaterial ScienceMicrofabricationMechanical EngineeringSolid MechanicsFlexible ElectronicsMaterials EngineeringMechanics Of Materials

Publications per year

1992–1996

4

Publications

4

A new analytical solution for the load-deflection of square membranes

D Maier-Schneider, Julia Maibach · Journal of Microelectromechanical Systems · 1995 · 208 citations

Membrane Structure, Engineering, Fluid Mechanics +21

Elastic properties and microstructure of LPCVD polysilicon films

D Maier-Schneider, A Köprülülü, S Ballhausen Holm · Journal of Micromechanics and Microengineering · 1996 · 107 citations

Materials Science, Materials Engineering, Ion Implantation +13

Variations in Young's modulus and intrinsic stress of LPCVD-polysilicon due to high-temperature annealing

D Maier-Schneider, Julia Maibach, Dieter Schneider · Journal of Micromechanics and Microengineering · 1995 · 103 citations

Materials Engineering, Materials Science, Material Analysis +14

Computer-aided characterization of the elastic properties of thin films

D Maier-Schneider, Julia Maibach · Journal of Micromechanics and Microengineering · 1992 · 32 citations

Materials Science, Computerized Measuring System, Engineering +12

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