Computer-aided characterization of the elastic properties of thin films

Abstract

A computerized measuring system is presented which permits determination of the elastic properties of thin films. Membrane theory yields a definite relationship between the deflection of a thin membrane and an external load. From analysis of this function, both Young's modulus and intrinsic stress can be determined independently of each other. The applicability of the measuring method is demonstrated by investigations carried out on rectangular membranes of polycrystalline silicon and silicon nitride of various sizes.