The role of atomic hydrogen in pre-epitaxial silicon substrate cleaning

Low Temperature Surface Cleaning of Silicon and Its Application to Silicon MBE

Akitoshi Ishizaka, Y. Shiraki · Journal of The Electrochemical Society · 1986 · 1.6K citations

Engineering, Materials Engineering, Materials Science +17

Low-Temperature Cleaning of GaAs Substrate by Atomic Hydrogen Irradiation

Takeyoshi Sugaya, Mitsuo Kawabe · Japanese Journal of Applied Physics · 1991 · 160 citations

Engineering, Materials Engineering, Materials Science +16

<i>I</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> cleaning of silicon substrate surfaces by remote plasma-excited hydrogen

B. Anthony, L. Breaux, Tsan‐sheng Hsu et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 128 citations

Natural Sciences, Materials Engineering, Materials Science +17

Quantitative characterization of a highly effective atomic hydrogen doser

Christian Eibl, Güenther Lackner, A. Winkler · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 68 citations

Medicine, Materials Science, Physics +13

Cost-effective cleaning and high-quality thin gate oxides

Marc Heyns, Twan Bearda, Ingrid Cornelissen et al. · IBM Journal of Research and Development · 1999 · 48 citations

Engineering, Materials Engineering, Materials Science +17