Concepedia

Oliver Senftleben

OS

Statistics

Publications

2

Citations

36

H-Index

2

Active since

2007

Affiliations

Universität der Bundeswehr München(Current)

Oliver Senftleben is an author at Universität der Bundeswehr München specializing in atomic hydrogen regions, semiconductor devices, and silicon.

Publications per year

2007–2008

2

Publications

2

The role of atomic hydrogen in pre-epitaxial silicon substrate cleaning

Andreas Aßmuth, Tanja Stimpel‐Lindner, Oliver Senftleben et al. · Applied Surface Science · 2007 · 26 citations

, , +14

Cleaning of Silicon Surfaces for Nanotechnology

Oliver Senftleben, H. Baumgärtner, I. Eisele · Materials science forum · 2008 · 10 citations · Full text

, , +17

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