Statistics
Publications
11
Citations
421
H-Index
11
Active since
1989
Affiliations
The University of Texas at Austin(Current)
B. Anthony is an author at The University of Texas at Austin specializing in natural sciences, materials science, and chemical vapor deposition.
Publications per year
1989–1992
11
11
B. Anthony, L. Breaux, Tsan‐sheng Hsu et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 128 citations
Natural Sciences, Materials Engineering, Materials Science +17
Very low defect remote hydrogen plasma clean of Si (100) for homoepitaxy
B. Anthony, Tsan‐sheng Hsu, L. Breaux et al. · Journal of Electronic Materials · 1990 · 47 citations
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