Concepedia

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Cleaning and passivation of the Si(100) surface by low temperature remote hydrogen plasma treatment for Si epitaxy

DOI

46

Citations

22

References

1991

Year

Tsan‐sheng Hsu, B. Anthony, Ruizhe Qian, J. Irby, Sanjay K. Banerjee, A.F. Tasch, S. Lin, H.L. Marcus, C. W. Magee
Journal of Electronic Materials

References

YearCitations

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