Ingrid Cornelissen

A Detailed Study on the Growth of Thin Oxide Layers on Silicon Using Ozonated Solutions

Florimond De Smedt, Chris Vinckier, Ingrid Cornelissen et al. · Journal of The Electrochemical Society · 2000 · 61 citations

Advanced Oxidation Process, Engineering, Oxidation Resistance +20

Cost-effective cleaning and high-quality thin gate oxides

Marc Heyns, Twan Bearda, Ingrid Cornelissen et al. · IBM Journal of Research and Development · 1999 · 48 citations

Materials Engineering, Electrical Engineering, Chemical Engineering +14

A Novel Resist and Post-Etch Residue Removal Process Using Ozonated Chemistry

Stefan De Gendt, Preston T. Snee, Ingrid Cornelissen et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 1998 · 30 citations

Advanced Oxidation Process, Chemical Engineering, Environmental Chemistry +10

Implementation of the IMEC-Clean in advanced CMOS manufacturing

Marc Meuris, Sophia Arnauts, Ingrid Cornelissen et al. · 2003 · 16 citations

Electrical Engineering, Physical Design (Electronics), Engineering +15

A Wet chemical Method for the Determination of Thickness of SiO2 Layers below the Nanometer Level

Florimond De Smedt, G. Stevens, Stefan De Gendt et al. · Journal of The Electrochemical Society · 1999 · 13 citations

Engineering, Si Isotope, Chemistry +22