Microstereophotolithography and shape memory alloy for the fabrication of miniaturized actuators

Shape-memory properties in Ni-Ti sputter-deposited film

J. Busch, Aaron D. Johnson, C. H. Lee et al. · Journal of Applied Physics · 1990 · 214 citations

Natural Sciences, Materials Engineering, Materials Science +17

Thin-film processing of TiNi shape memory alloy

James Alfred Walker, K.J. Gabriel, Mehran Mehregany · Sensors and Actuators A Physical · 1990 · 183 citations

Natural Sciences, Materials Engineering, Materials Science +14

Shape memory thin film of TiNi formed by sputtering

Akira Ishida, Atsushi Takei, Shuichi Miyazaki · Thin Solid Films · 1993 · 113 citations

Natural Sciences, Materials Engineering, Materials Science +11

Millimeter-sized joint actuator using a shape memory alloy

Katsutoshi Kuribayashi · Sensors and Actuators · 1989 · 54 citations

Engineering, Materials Engineering, Materials Science +13

Shape memory alloy microactuators

Massimo Bergamasco, Paolo Dario, F. Salsedo · Sensors and Actuators A Physical · 1990 · 35 citations

Engineering, Materials Engineering, Materials Science +12