Phosphorus redistribution in the surface region of heavily phosphorus doped silicon - Concepedia

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Phosphorus redistribution in the surface region of heavily phosphorus doped silicon

13

Citations

7

References

1996

Year

Yusuke Mizokawa, W.B. Ying, Yaozhong Yu, Y. Kamiura, Makio Iida, K. Kawamoto

Applied Surface Science

Materials ScienceSurface RegionEngineeringPhosphorus RedistributionSurface ScienceApplied PhysicsSemiconductor MaterialSemiconductor Device FabricationChemistryPhosphoreneSilicon On Insulator

References

	Year	Citations

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