Optics Letters · 2011 · 30 citations · 7 references
Optical MaterialsEngineeringOptical TestingOptomechanical SystemOptical MetrologyFiber OpticsOptomechanicsMicro-optical ComponentLight EnergyOptical PropertiesOptical Fiber ProbeOptical SystemsInstrumentationSpherical CouplingSpherical CouplerPhotonicsFiber Optic SensingFiber OpticOptical SensorsOrganic PhotonicsMultimaterial FiberApplied Physics
An optical fiber probe, based on spherical coupling of light energy, is proposed to transform the lateral displacement of a spherical coupler into the deflection of a light energy center, while the light energy is transmitted in the reverse direction. Therefore, the shadowing effect of a microcavity can be eliminated. The probe has a high displacement sensitivity, allowing precision inner-dimension measurements of microstructures with high aspect ratios. Measurements of microholes and fuel injection nozzles indicate that, for a microstructure with an aspect ratio of up to 15:1, a probing force <1 μN, a resolution of up to 0.05 μm can be achieved using the proposed probe, which is easy to exchange and low cost.
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Atomic force probe for sidewall scanning of nano- and microstructures
Gaoliang Dai, Helmut Wolff, Frank Pohlenz et al. · Applied Physics Letters · 2006 · 59 citations
Engineering, Afm Tip, Microscopy +20