Atomic force probe for sidewall scanning of nano- and microstructures

Abstract

An atomic force microscope (AFM) probe applicable for sidewall scanning has been developed. In its configuration, a horizontal AFM cantilever is microassembled with a vertical AFM cantilever. An AFM tip located at the free end of the vertical cantilever and extending horizontally is capable of probing in a direction perpendicular to sidewalls. The bending, torsion, or deformation of the horizontal cantilever is detected when the tip is brought into contact, intermittent contact, or noncontact with sidewalls. Measurement results taken at the sidewalls of microtrenches, microgears, and line edge roughness samples are presented.