Concepedia

S. Aoki

SA

4

Publications

87

Citations

4

H-Index

2000

Active since

Affiliations

Panasonic (Japan)(Current)

S. Aoki is an author at Panasonic (Japan) specializing in engineering, mechanical engineering, and microfabrication.

Top concepts

EngineeringMechanical EngineeringMaterial ScienceMicrofabricationEducationMeasurementMechatronicsMicrostructureApplied PhysicsInstrumentation

Publications per year

2000–2005

4

Publications

4

Dimensional measurement of high aspect ratio micro structures with a resonating micro cantilever probe

Masahiro Yamamoto, Hideki Takeuchi, S. Aoki · Microsystem Technologies · 2000 · 36 citations

Dimensional Measurement, Engineering, Microscopy +9

Profile measurement of high aspect ratio micro structures using a tungsten carbide micro cantilever coated with PZT thin films

Masaki Yamamoto, Isaku Kanno, S. Aoki · 2002 · 24 citations

Engineering, Harms Evaluation, Micromechanics +20

Fine surface finishing method for 3-dimensional micro structures

Kenichi Takahata, S. Aoki, Takeo Sato · 2002 · 15 citations

Engineering, Mechanical Engineering, Computer-aided Design +18

Evaluation of the micro wobble motor fabricated by concentric build-up process

Kyoko Nakamura, Hiroshi Ogura, Shigeo Maeda et al. · 2005 · 12 citations

Engineering, Micromechanics, Mechanical Engineering +16

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