Releasing SU-8 structures using polystyrene as a sacrificial material - Concepedia

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Releasing SU-8 structures using polystyrene as a sacrificial material

57

Citations

9

References

2004

Year

Cheng Luo, Amitha Govindaraju, John Garra, Thomas W. Schneider, Robert D. White, J. F. Currie, Makarand Paranjape

Sensors and Actuators A Physical

Materials SciencePolymer MaterialEngineeringPolymer ScienceSu-8 StructuresPolymer EngineeringPolymer Chemistry

References

	Year	Citations

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