Concepedia

Polymer Sacrificial Layers

Polymer Sacrificial Layer is a transient polymer-based material used in microfabrication processes to temporarily support or pattern functional structures, which is selectively removed without damaging surrounding components to enable the release or assembly of freestanding devices.

91

Publications

7.3K

Citations

379

Authors

126

Institutions

Publications per year

2017–2026

16

Parents

Publications

91

Sub–10 nm polyamide nanofilms with ultrafast solvent transport for molecular separation

Santanu Karan, Zhiwei Jiang, Andrew G. Livingston · Science · 2015 · 2K citations

, , +17

Deterministic transfer of two-dimensional materials by all-dry viscoelastic stamping

Andrés Castellanos-Gómez, Michele Buscema, Rianda Molenaar et al. · 2D Materials · 2014 · 2K citations

, , +12

Water‐Soluble Sacrificial Layers for Surface Micromachining

Vincent Linder, Byron D. Gates, Declan Ryan et al. · Small · 2005 · 207 citations

, , +14

Three-dimensional microfabrication by use of single-photon-absorbed polymerization

Shoji Maruo, Koji Ikuta · Applied Physics Letters · 2000 · 145 citations

, , +12

Process integration of self-assembled polymer templates into silicon nanofabrication

K.W. Guarini, Charles T. Black, Y. Zhang et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 136 citations

, , +17

1–5 of 91

Authors

379

  1. PA
    Paul A. Kohl

    Georgia Institute of Technology, United States

    10 publications · 467 citations

    10

    h-index

  2. SA
    Sue Ann Bidstrup Allen

    Georgia Institute of Technology, United States

    5 publications · 215 citations

    5

    h-index

  3. AW
    Alexander Wokaun

    Paul Scherrer Institute, Switzerland

    3 publications · 122 citations

    3

    h-index

  4. LF
    Larry F. Rhodes

    Georgia Institute of Technology, United States

    3 publications · 86 citations

    3

    h-index

  5. OG
    Oliver G. Schmidt

    Leibniz Institute for Solid State and Materials Research, Germany

    3 publications · 131 citations

    3

    h-index

1–5 of 379

Institutions

126

  1. Georgia Institute of Technology

    Atlanta, United States

    12 h-index

    38 publications

    1.4K citations

  2. Centre National de la Recherche Scientifique

    Paris, France

    3 h-index

    13 publications

    194 citations

  3. The Ohio State University

    Columbus, United States

    3 h-index

    11 publications

    265 citations

  4. Leibniz Institute for Solid State and Materials Research

    Dresden, Germany

    3 h-index

    18 publications

    867 citations

  5. University of Illinois Urbana-Champaign

    Urbana, United States

    3 h-index

    11 publications

    603 citations

  6. Swiss Federal Laboratories for Materials Science and Technology

    Dübendorf, Switzerland

    3 h-index

    13 publications

    516 citations

  7. Institute for Plasma Research

    Gandhinagar, India

    2 h-index

    2 publications

    64 citations

  8. University of Southampton

    Southampton, United Kingdom

    2 h-index

    4 publications

    100 citations

1–8 of 126

Venues

  1. Journal of Micromechanics and Microengineering

    JMM · 6 publications · 123 citations

    6

    h-index

  2. Journal of The Electrochemical Society

    JES · 5 publications · 150 citations

    5

    h-index

  3. Applied Physics Letters

    4 publications · 297 citations

    4

    h-index

  4. 4

    h-index

  5. ACS Nano

    2 publications · 61 citations

    3

    h-index

1–5