A Fully Functional 64 Mb DDR3 ST-MRAM Built on 90 nm CMOS Technology

Abstract

A spin torque magnetoresistive random access memory (ST-MRAM) holds great promise to be a fast, high density, nonvolatile memory that can enhance the performance of a variety of applications, particularly when used as a non-volatile buffer in data storage devices and systems. Towards that end, we have developed a fully functional 64 Mb DDR3 ST-MRAM built on 90 nm CMOS technology. The memory is organized in an 8-bank configuration that can sustain 1.6 GigaTransfers/s (DDR3-1600). We have run standard memory tests, such as a March6N pattern, on the full 64 Mb at 800 MHz with 0 fails for greater than 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</sup> cycles. Full functionality was also verified from 0°C to 70°C with no significant change in performance. The bits are magnetic tunnel junctions (MTJs) having an MgO tunnel barrier and a magnetic free layer made of a CoFeB-based alloy with an in-plane magnetization, but with an out-of-plane anisotropy reduced by more than 50% due to an enhanced perpendicular surface anisotropy. To enable the 64 Mb performance, we developed an MTJ stack that has low switching voltage (V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">sw</sub> ), high breakdown voltage (V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">bd</sub> ), and excellent switching reliability with tight distributions. The ST switching distribution has σ ≈ 10%, and we found excellent agreement with a single Gaussian distribution down to an error rate . For our optimized material, the V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">sw</sub> /V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">bd</sub> ≈ 0.3, and the separation between V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">sw</sub> and V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">bd</sub> is ≈ 25σ. The energy barrier to magnetization reversal (E <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">b</sub> ) was characterized using both time-dependent coercivity and higher temperature to accelerate reversal. We found the average E <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">b</sub> ≈ 70kbT.