Thermal evolution of extended defects in implanted Si: - Concepedia

Concepedia

Publication | Closed Access

Thermal evolution of extended defects in implanted Si:

65

Citations

27

References

2000

Year

A. Claverie, B. Colombeau, Gérard Assayag, Caroline Bonafos, F. Cristiano, M. Omri, B. de Mauduit

Materials Science in Semiconductor Processing

EngineeringPhysicsThermal EvolutionApplied PhysicsDefect FormationElectronic PackagingSilicon On InsulatorDefect Tolerance

References

	Year	Citations

Page 1