A systematic analysis of defects in ion-implanted silicon - Concepedia

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A systematic analysis of defects in ion-implanted silicon

503

Citations

85

References

1988

Year

K. S. Jones, S.G. Prussin, E. R. Weber

Applied Physics A

Electrical EngineeringIon ImplantationEngineeringSystematic AnalysisApplied PhysicsDefect FormationSilicon Debugging

References

	Year	Citations

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