1993 · 26 citations · 9 references
EngineeringHeat RecoveryEnergy EfficiencyImproved Dynamic ModelModel Predictive ControllerMultivariable Temperature ControlRefrigerationSystems EngineeringModeling And SimulationThermal ModelingModel Predictive ControlThermodynamicsNmpc FormulationModel-based Control TechniqueComputer EngineeringHeat TransferEnergy ManagementHeat ExchangerThermal ManagementProcess ControlThermal EngineeringReal Rtp SystemsRapid Thermal Processing
An improved dynamic model for a multi-zone circularly symmetric rapid thermal processing (RTP) system has been developed and validated. The model incorporates radiative, conductive and convective heat transfer mechanisms and allows for chamber heat-up as observed in real RTP systems. A multivariable nonlinear model predictive controller (NMPC) has been developed for this system. We investigate how the choice of the objective function in the NMPC formulation of a distributed parameter system impacts controller performance.
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