Concepedia

Karson L. Knutson

KL

Statistics

Publications

8

Citations

200

H-Index

8

Active since

1989

Affiliations

University of Minnesota(Current)

Massachusetts Institute of Technology

Karson L. Knutson is an author at University of Minnesota specializing in engineering, thermodynamics, and thermal engineering.

Top concepts

EngineeringThermodynamicsHeat TransferThermal ManagementThermal EngineeringThermal ModelingApplied PhysicsNumerical SimulationElectrical EngineeringHigh Temperature Materials

Publications per year

1989–1996

8

Publications

8

Steady-state thermal uniformity and gas flow patterns in a rapid thermal processing chamber

Stephen A. Campbell, Kang‐Ho Ahn, Karson L. Knutson et al. · IEEE Transactions on Semiconductor Manufacturing · 1991 · 72 citations

Gas Flow Patterns, Heat Transfer Process, Engineering +15

A kinetics and transport model of dichlorosilane chemical vapor deposition

Karson L. Knutson, Robert W. Carr, W.H. Liu et al. · Journal of Crystal Growth · 1994 · 32 citations

Chemical Engineering, Engineering, Diffusion Resistance +8

A Systematic Approach to Simulating Rapid Thermal Processing Systems

T. Merchant, J. Vernon Cole, Karson L. Knutson et al. · Journal of The Electrochemical Society · 1996 · 27 citations

Radiative Heat Transfer, Engineering, Simulation +21

Transient effects in rapid thermal processing

Stephen A. Campbell, Karson L. Knutson · IEEE Transactions on Semiconductor Manufacturing · 1992 · 26 citations

Ramp Rate, Engineering, High Temperature Materials +14

Modeling of three-dimensional effects on temperature uniformity in rapid thermal processing of eight inch wafers

Karson L. Knutson, Stephen A. Campbell, F.E. Dunn · IEEE Transactions on Semiconductor Manufacturing · 1994 · 13 citations

Radiative Heat Transfer, Engineering, Energy Efficiency +29

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