Concepedia

Karson L. Knutson

KL

Statistics

Publications

8

Citations

200

H-Index

8

Active since

1989

Affiliations

University of Minnesota(Current)

Massachusetts Institute of Technology

Karson L. Knutson is an author at University of Minnesota specializing in engineering, heat transfer, and heat transfer modeling.

Publications per year

1989–1996

8

Publications

8

Steady-state thermal uniformity and gas flow patterns in a rapid thermal processing chamber

Stephen A. Campbell, Kang‐Ho Ahn, Karson L. Knutson et al. · IEEE Transactions on Semiconductor Manufacturing · 1991 · 72 citations

Engineering, Mechanical Engineering, Computational Heat Transfer +16

A kinetics and transport model of dichlorosilane chemical vapor deposition

Karson L. Knutson, Robert W. Carr, W.H. Liu et al. · Journal of Crystal Growth · 1994 · 32 citations

Natural Sciences, Chemical Engineering, Materials Engineering +12

A Systematic Approach to Simulating Rapid Thermal Processing Systems

T. Merchant, J. Vernon Cole, Karson L. Knutson et al. · Journal of The Electrochemical Society · 1996 · 27 citations

Engineering, Computational Engineering, Mechanical Engineering +17

Transient effects in rapid thermal processing

Stephen A. Campbell, Karson L. Knutson · IEEE Transactions on Semiconductor Manufacturing · 1992 · 26 citations

Engineering, Electrical Engineering, Materials Engineering +17

Modeling of three-dimensional effects on temperature uniformity in rapid thermal processing of eight inch wafers

Karson L. Knutson, Stephen A. Campbell, F.E. Dunn · IEEE Transactions on Semiconductor Manufacturing · 1994 · 13 citations

Engineering, Materials Engineering, Mechanical Engineering +17

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