Statistics
Publications
25
Citations
338
Authors
3
Location
Newport Beach, United States
Ultrawave Labs (United States) is a company institution in Newport Beach, United States known for engineering, semiconductor devices, and manufacturing engineering.
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Wafer-shape based in-plane distortion predictions using Superfast 4G metrology
Leon van Dijk, Jeffrey Mileham, Ilja Malakhovsky et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 29 citations
Engineering, Manufacturing Engineering, Microelectronics +12
Intra-field stress impact on global wafer deformation
Richard J. F. van Haren, Ronald Otten, Subodh Sourabh Singh et al. · 2019 · 27 citations
Engineering, Manufacturing Engineering, Materials Science +14
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