Statistics
Publications
1
Citations
27
H-Index
1
Active since
2019
Affiliations
IMEC(Current)
Ronald Otten is an author at IMEC specializing in overlay metrology, thermal expansion correction, and engineering.
Publications per year
2019–2019
1
1
Intra-field stress impact on global wafer deformation
Richard J. F. van Haren, Ronald Otten, Subodh Sourabh Singh et al. · 2019 · 27 citations
Engineering, Manufacturing Engineering, Materials Science +14
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