Concepedia
1
Publications
27
Citations
H-Index
2019
Active since
Affiliations
IMEC(Current)
Richard J. F. van Haren is an author at IMEC.
Publications per year
2019–2019
Intra-field stress impact on global wafer deformation
Richard J. F. van Haren, Ronald Otten, Subodh Sourabh Singh et al. · 2019 · 27 citations
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