Statistics
Publications
1
Citations
27
H-Index
1
Active since
2019
Affiliations
Ultrawave Labs (United States)(Current)
Subodh Sourabh Singh is an author at Ultrawave Labs (United States) specializing in thin film strain, thermal expansion correction, and thermomechanical stress.
Publications per year
2019–2019
1
1
Intra-field stress impact on global wafer deformation
Richard J. F. van Haren, Ronald Otten, Subodh Sourabh Singh et al. · 2019 · 27 citations
Engineering, Manufacturing Engineering, Materials Science +14
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