Jeffrey Mileham

Wet chemical etching of AlN

Jeffrey Mileham, S. J. Pearton, C. R. Abernathy et al. · Applied Physics Letters · 1995 · 164 citations

Materials Science, Materials Engineering, Chemical Engineering +15

Patterning of AlN, InN, and GaN in KOH-based solutions

Jeffrey Mileham, S. J. Pearton, C. R. Abernathy et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 89 citations

Mathematical Programming, Semiconductors, Materials Science +14

The incorporation of hydrogen into III-V nitrides during processing

S. J. Pearton, R. J. Shul, R. G. Wilson et al. · Journal of Electronic Materials · 1996 · 33 citations

Iii-v Nitrides, Chemical Engineering, Engineering +5

Wafer-shape based in-plane distortion predictions using Superfast 4G metrology

Leon van Dijk, Jeffrey Mileham, Ilja Malakhovsky et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 28 citations

Wafer Distortions, Engineering, Physical Design (Electronics) +16

Intra-field stress impact on global wafer deformation

Richard J. F. van Haren, Ronald Otten, Subodh Sourabh Singh et al. · 2019 · 27 citations