Statistics
Publications
1
Citations
28
H-Index
1
Active since
2017
Affiliations
ASML (Netherlands)(Current)
Ilja Malakhovsky is an author at ASML (Netherlands) specializing in materials engineering, microelectronics, and electronic packaging.
Publications per year
2017–2017
1
1
Wafer-shape based in-plane distortion predictions using Superfast 4G metrology
Leon van Dijk, Jeffrey Mileham, Ilja Malakhovsky et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 28 citations
Wafer Distortions, Engineering, Physical Design (Electronics) +16
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