Statistics
Publications
1
Citations
29
H-Index
1
Active since
2017
Affiliations
ASML (Netherlands)(Current)
Ilja Malakhovsky is an author at ASML (Netherlands) specializing in planarization, thin film etching, and semiconductor devices.
Publications per year
2017–2017
1
1
Wafer-shape based in-plane distortion predictions using Superfast 4G metrology
Leon van Dijk, Jeffrey Mileham, Ilja Malakhovsky et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 29 citations
Engineering, Manufacturing Engineering, Microelectronics +12
1–1 of 1