Concepedia

Selective Etch Stop Layers

Selective Etch Stop Layers is a micromachining technique that serves as a selectively resistant thin-film material engineered to halt specific etching processes at predetermined depths while allowing continued removal of surrounding structural layers in bulk micromachined microelectromechanical systems.

21

Publications

591

Citations

76

Authors

23

Institutions

Publications per year

2017–2026

2

Variants

Selective Etch-stop Layers

Parents

Publications

21

Sacrificial etching of III - V compounds for micromechanical devices

Klas Hjort · Journal of Micromechanics and Microengineering · 1996 · 102 citations

, , +16

Photoelectrochemical conductivity selective etch stops for SiC

Joseph Shor, Richard M. Osgood, A. D. Kurtz · Applied Physics Letters · 1992 · 53 citations

, , +17

Epitaxial ScAlN Etch-Stop Layers Grown by Molecular Beam Epitaxy for Selective Etching of AlN and GaN

Matthew T. Hardy, Brian P. Downey, David J. Meyer et al. · IEEE Transactions on Semiconductor Manufacturing · 2017 · 48 citations

, , +17

A GaAs pressure sensor based on resonant tunnelling diodes

Kristel Fobelets, R. Vounckx, G. Borghs · Journal of Micromechanics and Microengineering · 1994 · 36 citations

, , +17

Bulk silicon holding structures for mounting of optical fibers in v-grooves

Carola Strandman, Ylva Bäcklund · Journal of Microelectromechanical Systems · 1997 · 33 citations

, , +17

1–5 of 21

Authors

76

  1. HM
    H.F. MacMillan

    Varian Medical Systems (United States), United States

    2 publications · 42 citations

    2

    h-index

  2. CB
    C. B. Cooper

    Varian Medical Systems (United States), United States

    2 publications · 42 citations

    2

    h-index

  3. TB
    T.P.E. Broekaert

    Massachusetts Institute of Technology, United States

    2 publications · 45 citations

    2

    h-index

  4. CG
    Clifton G. Fonstad

    Massachusetts Institute of Technology, United States

    2 publications · 45 citations

    2

    h-index

  5. SS
    S. Salimian

    Varian Medical Systems (United States), United States

    2 publications · 42 citations

    2

    h-index

1–5 of 76

Institutions

23

  1. Massachusetts Institute of Technology

    Cambridge, United States

    3 h-index

    6 publications

    132 citations

  2. United States Naval Research Laboratory

    Washington, United States

    2 h-index

    12 publications

    390 citations

  3. AT&T (United States)

    Bedminster, United States

    2 h-index

    12 publications

    287 citations

  4. Uppsala University

    Uppsala, Sweden

    2 h-index

    3 publications

    168 citations

  5. Varian Medical Systems (United States)

    Palo Alto, United States

    2 h-index

    6 publications

    126 citations

  6. Pennsylvania State University

    State College, United States

    1 h-index

    2 publications

    22 citations

  7. Naval Research Laboratory Electronics Science and Technology Division

    Washington, United States

    1 h-index

    6 publications

    102 citations

  8. IBM (United States)

    Armonk, United States

    1 h-index

    3 publications

    93 citations

1–8 of 23

Venues

  1. Applied Physics Letters

    4 publications · 116 citations

    4

    h-index

  2. Journal of The Electrochemical Society

    JES · 4 publications · 75 citations

    4

    h-index

  3. 3

    h-index

  4. Journal of Micromechanics and Microengineering

    JMM · 2 publications · 138 citations

    2

    h-index

  5. Journal of Electronic Materials

    JEM · 1 publications · 11 citations

    1

    h-index

1–5